Advanced Depth Profiling Characterization of Mixed Organic/Inorganic Layers Using X-ray Photoelectron Spectroscopy (XPS) and a Combined Monatomic and Gas Cluster Ion Source (MAGCIS)

Organic electronic devices are becoming increasingly important in a wide variety of applications. These nano-structured devices are typically composed of complex thin/ultrathin multilayers of novel organic or organometallic compounds, along with inorganic materials. The overall electronic behavior of these devices is strongly influenced by the electronic properties and chemical compositions of the individual layers, as well as interactions at the various layer interfaces. Detailed knowledge of surface and interface chemistry is a crucial factor for the successful production and optimization of such devices.